Test-gas leak detector

US7240536B2 · kind B2 · utility

Assignee

• OERLIKON LEYBOLD VACCUM GMBH · DE

Inventors

• Christian Beyer · Freiberg, DE
• Hermann Boy · Kerpen, DE
• Rainer Hölzer · Bad Mergentheim, DE
• Gunter Holstein · Cologne, DE

Key dates

• Filing date: Dec 19, 2003
• Grant date: Jul 10, 2007
• Expiry date: Dec 19, 2023

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F04D27/00
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

A test-gas leak detector (1) includes a connection (27) for a device under test, a sniffer, or a leak detector chamber, a high-vacuum pump (2), a test-gas detector (5) that is connected on the intake side of said pumps, and a test-gas conduit (28) leading from the connection of the leak detector (27). The conduit is connected to at least one intermediate stage of the high-vacuum pump (2) in addition to the pre-vacuum zone of the high-vacuum pump (2) via conduit sections (31, 32, 35) and valves (33, 34, 36). A housing (9), in which at least some of the conduits and valves and the high-vacuum pump (2) are integrated, forms part of the leak detector (1) and a detachable slide-in module (51) forms part of the high-vacuum pump. The slide-in module has an external jacket construction (53) comprising passages (58, 61) and when the leak detector (1) is operational, is situated in a receiving opening (52) that is provided in the housing (9).