Capillary-channel probes for liquid pickup, transportation and dispense using stressy metal

US7241420B2 · kind B2 · utility

Assignee

• Palo Alto Research Center Incorporated · US

Inventors

• Thomas Hantschel · Houtvenne, BE
• David K. Fork · Mountain View, US
• Eugene M. Chow · Fremont, US
• Dirk De Bruyker · Palo Alto, US
• Michel A. Rosa · San Jose, US

Key dates

• Filing date: Aug 5, 2002
• Grant date: Jul 10, 2007
• Expiry date: Aug 3, 2024

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T436/2575
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Fluidic conduits, which can be used in microarraying systems, dip pen nanolithography systems, fluidic circuits, and microfluidic systems, are disclosed that use channel spring probes that include at least one capillary channel. Formed from spring beams (e.g., stressy metal beams) that curve away from the substrate when released, channels can either be integrated into the spring beams or formed on the spring beams. Capillary forces produced by the narrow channels allow liquid to be gathered, held, and dispensed by the channel spring probes. Because the channel spring beams can be produced using conventional semiconductor processes, significant design flexibility and cost efficiencies can be achieved.