Frequency tunable resonant scanner
US7242511B2 · kind B2 · utility
5Cited by
4References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 14, 2004 |
| Grant date | Jul 10, 2007 |
| Priority date | — |
| Expiry date | Dec 14, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Provided is a one-axis driving optical scanner which includes a substrate, a stage separated from the substrate to a predetermined height and having an upper surface where an optical scanning surface is formed, a torsion spring supporting the stage from middle portions of both edge sides of the stage, a support portion fixed to the substrate to support the torsion spring, a driving portion rotating the stage with respect to the torsion spring forming a center axis, and a flat panel type tuning electrode arranged in an area of the substrate corresponding to the stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.