Cantilever beam MEMS variable optical attenuator

US7242825B2 · kind B2 · utility

Assignee

• Xerox Corporation · US

Inventors

• Pinyen Lin · Rochester, US
• Yao Rong Wang · Webster, US
• Jun Ma · 流花街道, CN
• Xueyuan Liu · Webster, US
• Peter M. Gulvin · Webster, US
• Kristine A. German · Webster, US
• Joel A. Kubby · Rochester, US

Key dates

• Filing date: Dec 13, 2004
• Grant date: Jul 10, 2007
• Expiry date: Dec 13, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B6/3596
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An improved cantilever beam optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.