MEMS SAW sensor
US7243547B2 · kind B2 · utility
64Cited by
3References
59Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 13, 2004 |
| Grant date | Jul 17, 2007 |
| Priority date | — |
| Expiry date | Feb 24, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Devices and methods for acoustically measuring temperature and pressure are disclosed. An illustrative SAW sensor can include an electrode structure that transmits and receives surface acoustic waves along a SAW delay line, a temperature sensor for measuring temperature along a first direction of the SAW delay line, and a pressure sensor for measuring pressure along a second direction of the SAW delay line. The SAW sensor can include an antenna that wirelessly transmits and receives RF signals to and from an electrical interrogator unit that can be used to power the SAW sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.