Pressure sensor assembly
US7243552B2 · kind B2 · utility
5Cited by
6References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 9, 2005 |
| Grant date | Jul 17, 2007 |
| Priority date | — |
| Expiry date | May 9, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4998
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A silicon-based high pressure sensor module incorporates a low temperature cofired ceramic (LTCC) substrate. The LTCC substrate can withstand high pressures. A bossed container filled with oil is mounted on the substrate and houses a sensor cell. The top surface of the bossed container is flexible and deflects under pressure. By controlling the surface area and the thickness of the top surface, the pressure sensor can be configured to measure a wide range of pressures. The oil transfers pressure from the bossed container to the diaphragm of the sensor cell while protecting the sensor cell from high pressures and harsh media.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.