MEMS surface modification for passive control of charge accumulation
US7244631B1 · kind B1 · utility
3Cited by
4References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2005 |
| Grant date | Jul 17, 2007 |
| Priority date | — |
| Expiry date | Jun 25, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B3/0086
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
In one embodiment, a method of treating a surface of a Micro-Electromechanical System (MEMS) device reduces or eliminates performance degradation due to charge migration and accumulation. Briefly, the method may include treating a dielectric surface of the MEMS device to replace hydroxyl groups with electrically neutral molecules, thereby converting the dielectric surface from a hydrophilic to a substantially hydrophobic nature. A MEMS device having a surface treated using the aforementioned method is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.