Patent · US Expired

Method of optimizing optical power use in a parallel processing laser system

US7244907B2 · kind B2 · utility

3Cited by
13References
11Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 30, 2004
Grant dateJul 17, 2007
Priority date
Expiry dateAug 8, 2024

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB23K2103/52
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

The present invention relates to optimizing optical power from a laser processing system, and more specifically to a method of optimizing the optical power by employing parallel laser processing techniques to maximize fabrication quality and yield. The method in the present invention includes the steps of: determining the specification for the final product, selecting the proper combination of optical power and processing method for processing a single feature, determining the maximum number of features in pattern to be parallel processed, selecting a portion of the desired pattern that can be parallel processed, designing the DOEs, manufacturing the DOEs, incorporating the DOE into laser processing system, operating and controlling the laser processing system, and determining if more DOEs are needed to complete the laser processing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.