Microresonator-based high-performance high-pressure sensor and system
US7244926B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2005 |
| Grant date | Jul 17, 2007 |
| Priority date | — |
| Expiry date | Mar 21, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L11/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optically-powered integrated microstructure pressure sensing system for sensing pressure within a cavity. the pressure sensing system comprises a pressure sensor having an optical resonant structure subject to the pressure within the cavity and having physical properties changing due to changing pressures within the cavity. A substrate supports the optical resonant structure. An input optical pathway evanescently couples light into the optical resonant structure. An output optical pathway collects light from the optical resonance structure. A light source delivers a known light input into the input optical pathway whereby the known light input is evanescently coupled into the optical resonant structure by the input optical pathway and a portion of such light is collected from the optical resonant structure by the output optical pathway. A light detector receives the portion of the light collected from the optical resonant structure, and generates a light signal indicative of such portion of the light collected from the optical resonant structure. A temperature compensation sensor generates a temperature signal indicative of the temperature near the optical resonant structure. A …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.