Atomic force microscope with probe with improved tip movement
US7246517B2 · kind B2 · utility
2Cited by
6References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 19, 2006 |
| Grant date | Jul 24, 2007 |
| Priority date | — |
| Expiry date | Jun 19, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2203/0286
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An atomic force microscope probe provides an indentation testing function in a direction along an axis. The probe has a tip and an arm structure holding the tip. The arm structure has one end mounted on a fixed stage, the other end coupled to the AFM tip, and a hollow frame having a shape symmetric with respect to a plane including an axis on which the two ends are positioned.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.