Precision machining apparatus and precision machining method
US7247081B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 27, 2005 |
| Grant date | Jul 24, 2007 |
| Priority date | — |
| Expiry date | Dec 27, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/30
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A precision machining apparatus and a precision machining method capable of carrying out grinding with accuracy by performing switching control, for example, on a device for rotating a grinding wheel according to grinding stages through the amount of movement and constant pressure changed stepwise. To a second pedestal 3 supporting a rotary device 6b for rotating a grinding wheel b, an actuator 5 and a feed screw mechanism 4 constituted by at least a feed screw 41 and a nut 42 are attached. In a rough grinding stage, the movement of the rotary device 6b and the second pedestal 3 is adjusted through a predetermined amount of movement of the nut 42. In a super-precision grinding stage, the movement of the rotary device 6b and the second pedestal 3 is adjusted by pressure control using stepwise a plurality of pneumatic actuators 5a, 5b differing in pressure performance. An attitude control device 7 is interposed between a first pedestal 2 and a rotary device 6a for rotating an object a to be ground.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.