Insulated pad conditioner and method of using same
US7247577B2 · kind B2 · utility
18Cited by
19References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 18, 2006 |
| Grant date | Jul 24, 2007 |
| Priority date | — |
| Expiry date | Apr 18, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/046
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A wafer planarization process with a conditioning tool having an electrical insulator that electrically insulates the abrasive surface of the conditioning tool. The electrical insulator extends the useful life of the abrasive surface of the conditioning tool by reducing the level of electrochemically driven corrosion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.