Monolithic vertical integration of an acoustic resonator and electronic circuitry
US7248131B2 · kind B2 · utility
15Cited by
16References
18Claims
0Family size
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Key dates
| Filing date | Mar 14, 2005 |
| Grant date | Jul 24, 2007 |
| Priority date | — |
| Expiry date | Jun 24, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Monolithic devices that include an acoustic resonator vertically integrated with electronic circuitry are described. In one aspect, a monolithic integrated device includes a substrate, electronic circuitry supported by the substrate, an acoustic isolator over the electronic circuitry, and an acoustic resonator on the acoustic isolator. A method of fabricating the monolithic device also is described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.