Surface profile measurement
US7248344B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 4, 2002 |
| Grant date | Jul 24, 2007 |
| Priority date | — |
| Expiry date | Nov 16, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D1/0274
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
An imaging system scans a light source output over an object to be imaged, and receives the reflected signal in a multi-region light detector, wherein different regions of the object to be imaged are imaged onto different regions of the detector by the receiving optics, and wherein different regions of the light detector can be actuated separately. The light source scanning is synchronized with the actuation of the light detector so that a region of the detector imaging the region of object being illuminated by the light source is actuated. The time of flight of light signals from the light source to the actuated portion of the detector is calculated for all scanning directions, to enable a three dimensional image of the object to be constructed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.