Apparatus and method for optical characterization of a sample over a broadband of wavelengths with a small spot size
US7248364B2 · kind B2 · utility
11Cited by
32References
34Claims
0Family size
Assignee
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Key dates
| Filing date | Dec 19, 2003 |
| Grant date | Jul 24, 2007 |
| Priority date | — |
| Expiry date | Dec 23, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B17/0663
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus and method for optically characterizing the reflection and transmission properties of a sample with a beam of light having a small diameter on a surface of the sample over a broadband of wavelengths, from 190 nm to 1100 nm. Reflective optical components, including off-axis parabolic mirrors with a collimated incident or reflected broadband beam of light, minimize non-chromatic aberration. The apparatus and method further disclose an optical light path that can be focused by adjusting the position of an off-axis parabolic mirror and a planar mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.