Method of forming a via in a microfabricated elastomer structure

US7250128B2 · kind B2 · utility

Assignee

• CALIFORNIA INSTITUTE OF TECHNOLOGY · US

Inventors

• Marc A. Unger · San Mateo, US
• Hou-Pu Chou · Foster City, US
• Todd A. Thorsen · Pasadena, US
• Axel Scherer · Laguna Beach, US
• Stephen R. Quake · Pasadena, US
• Jian Liu · San Jose, US
• Mark L. Adams · Pasadena, US
• Carl L. Hansen · Pasadena, US

Key dates

• Filing date: Apr 20, 2005
• Grant date: Jul 31, 2007
• Expiry date: Mar 16, 2026

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T137/87877
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.