Patent · US Expired

Determination and correction for laser induced CCD camera degradation

US7253905B2 · kind B2 · utility

0Cited by

4References

6Claims

0Family size

Inventors

Dirk Basting · Fort Lauderdale, US
Kai-Uwe Schmidt · Munich, DE
Holger Bald · Wildberg, DE
Christian Schramm · Lippstadt, DE

Key dates

Filing date	Nov 20, 2003
Grant date	Aug 7, 2007
Priority date	—
Expiry date	Jan 10, 2026

Classification

Technology area (CPC H)Electricity
CPC primaryH04N25/672
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A process for the determination and correction of laser induced damages of the optical and electronic components within the beam path of a monitor module of a 193 nm excimer lasers is provided herein. Especially state of the art detectors like CCD cameras degrade under UV radiation. With a special correction of the sensitivity of each camera pixel this problem can be solved.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.