Leak detecting device
US7254989B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 11, 2004 |
| Grant date | Aug 14, 2007 |
| Priority date | — |
| Expiry date | Aug 11, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/202
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A leak detecting device of the counterflow type includes a high vacuum pump having an inlet connected to a mass spectrometer. In addition, a prevacuum pump is provided having an inlet connected to an outlet of the high vacuum pump and a leak detecting device input. A connecting conduit is further provided between the leak detecting device input and an intermediate inlet of the high vacuum pump. A first valve of variable conductance is arranged in the course of the connecting conduit. Valves with a large inner diameter are expensive while valves with a small inner diameter show considerable resistance even in a fully opened state. A second valve arranged parallel to the first adjustable valve is provided in the course of the connecting conduit; thereby allowing the first and second valves to have relatively small inner diameters arranged in the connecting conduit, wherein the combined conductance of both opened valves is considerably increased.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.