Droplet jetting apparatus, method of operating droplet jetting apparatus, and device manufacturing method
US7255420B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 18, 2005 |
| Grant date | Aug 14, 2007 |
| Priority date | — |
| Expiry date | Nov 18, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/16552
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A droplet jetting apparatus having a droplet jetting head including a nozzle opening formed in a nozzle formation surface, from which droplets of a predetermined liquid are jetted, and a capping device for capping the nozzle opening of the head. A moisture retentive liquid supply device connected to the capping device is provided for supplying a moisture retentive liquid with respect to the predetermined liquid to a space formed by the nozzle formation surface and the capping portion. The weight and the size of the head and its periphery, which is a movable body, are not specifically increased, and accordingly, increase in the cost for motors for driving the droplet jetting head is prevented, thereby effectively avoiding clogging in the nozzle opening of the droplet jetting head. In addition, it is unnecessary to move the droplet jetting head when the moisture retentive liquid is supplied.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.