Diamond triode devices with a diamond microtip emitter
US7256535B2 · kind B2 · utility
1Cited by
33References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 28, 2004 |
| Grant date | Aug 14, 2007 |
| Priority date | — |
| Expiry date | Apr 28, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2201/30457
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Diamond microtip field emitters are used in triode vacuum microelectronic devices, sensors and displays. Diamond triode devices having integral anode and grid structures can be fabricated. Ultra-sharp tips are formed on the emitters in a fabrication process in which diamond is deposited into mold cavities in a two-step deposition sequence. During deposition of the diamond, the carbon graphite content is carefully controlled to enhance emission performance. The tips or the emitters are treated by post-fabrication processes to further enhance performance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.