Waveguide device and method for making same
US7256667B1 · kind B1 · utility
4Cited by
2References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 8, 2005 |
| Grant date | Aug 14, 2007 |
| Priority date | — |
| Expiry date | Mar 18, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P11/002
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A monolithic micromachined waveguide device or devices with low-loss, high-power handling, and near-optical frequency ranges is set forth. The waveguide and integrated devices are capable of transmitting near-optical frequencies due to optical-quality sidewall roughness. The device or devices are fabricated in parallel, may be mass produced using a LIGA manufacturing process, and may include a passive component such as a diplexer and/or an active capping layer capable of particularized signal processing of the waveforms propagated by the waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.