Patent · US Expired

Semiconductor array tester

US7256879B2 · kind B2 · utility

1Cited by
7References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 11, 2003
Grant dateAug 14, 2007
Priority date
Expiry dateJun 23, 2025

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S5/4031
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An array tester (10) characterizes individual ones (111) of a semiconductor devices of an array (11) based on polarization-resolving an optical far-field measurement of the individual chips (111) as a function of angular position. Two pairs of TM and TE detectors (41a-b and 42a-b) or one pair displaceable by ninety degrees, move in vertical and horizontal arc paths or fixed around a fixed position of a selected device of an array to sample the far-fields.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.