Micro-actuator, head gimbal assembly, disk drive unit and manufacturing method thereof
US7256967B2 · kind B2 · utility
3Cited by
7References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 23, 2004 |
| Grant date | Aug 14, 2007 |
| Priority date | — |
| Expiry date | Nov 12, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/58
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A head gimbal assembly (HGA) including a slider, a micro-actuator and a suspension to load the slider and the micro-actuator. The micro-actuator includes a support base and a piezoelectric unit used for both position displacement adjustment and flying height adjustment. The support base includes a base, a moving plate, and a leading beam to connect with the base and the moving plate. The invention also discloses a method of manufacturing such micro-actuator and HGA, and a structure of a disk drive having the micro-actuator and HGA.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.