Stage device
US7257902B2 · kind B2 · utility
37Cited by
1References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 18, 2006 |
| Grant date | Aug 21, 2007 |
| Priority date | — |
| Expiry date | Sep 18, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70716
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the stage to the base. The stage device comprises a scale unit having a scale part on the entire plane of the base, and three two-dimensional angle sensors disposed on a bottom surface of a movable stage part. The scale unit and the two-dimensional angle sensors form a surface encode. A position of the movable stage part is measured by the surface encoder.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.