Flow sensor with self-aligned flow channel
US7258003B2 · kind B2 · utility
27Cited by
68References
36Claims
0Family size
Assignee
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Key dates
| Filing date | Aug 31, 2004 |
| Grant date | Aug 21, 2007 |
| Priority date | — |
| Expiry date | Aug 31, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49798
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flow sensor is provided having a substrate with a sensing element and flow channel aligned over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is aligned by one or more guide elements formed in an alignment layer. The flow channel across the sensing area is accurately and precisely aligned due to the guide elements provided at the wafer-level, facilitating reliable, low-cost, and consistent results among multiple flow sensors. The flow sensor is adapted for use in harsh environments.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.