Piezoelectric bimorph actuator and method of manufacturing thereof
US7259499B2 · kind B2 · utility
3Cited by
148References
25Claims
0Family size
Inventors
Key dates
| Filing date | Oct 28, 2005 |
| Grant date | Aug 21, 2007 |
| Priority date | — |
| Expiry date | Oct 28, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/204
Abstract
An actuator is disclosed, which includes a piezoelectric bimorph. The actuator also includes a substantially moisture impervious and electrically insulating packaging having a cavity around the bimorph providing for a clearance around the bimorph. The packaging includes a carrier having first and second surfaces and an aperture wherein the bimorph is disposed, the packaging further includes first and second cover films selectively attached to the first and second surfaces respectively, and at least one flex circuit connected to the bimorph for supplying electrical energy thereto.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.