Process and apparatus for the decomposition of fluorine compounds
US7261868B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 15, 2004 |
| Grant date | Aug 28, 2007 |
| Priority date | — |
| Expiry date | Dec 27, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Fluorine compounds such as C2F6, CF4, CHF3, SF6 and NF3, are made to contact with a fluorine compound decomposition catalyst and a catalyst for the decomposition of at least one of CO, SO2F2 and N2O in the presence of water or in the presence of water and oxygen. The catalyst for the decomposition of at least one of CO, SO2F2 and N2O preferably contains at least one selected from Pd, Pt, Cu, Mn, Fe, Co, Rh, Ir and Au in the form of a metal or an oxide. According to the invention, the fluorine compound can be converted to HF, which can be absorbed by water or an alkaline aqueous solution. Furthermore, a substance such as CO, SO2F2 and N2O which is formed by decomposition of the fluorine compound can also be decomposed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.