Micro-oscillation element incorporating springs
US7262541B2 · kind B2 · utility
5Cited by
9References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 4, 2004 |
| Grant date | Aug 28, 2007 |
| Priority date | — |
| Expiry date | Jun 1, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.