Patent · US Expired

Method of arc detection

US7262606B2 · kind B2 · utility

17Cited by

5References

20Claims

0Family size

Assignee

HUETTINGER Elektronik GmbH + Co. KG · DE

Inventors

Sven Axenbeck · Neuenbürg, DE
Markus Bannwarth · Glückstadt, DE
Martin Steuber · Buggingen, DE
Alfred Trusch · Breisach am Rhein, DE
Lothar Wolf · Sasbach, DE
Peter Wiedemuth · Herbolzheim, DE
Gerhard Zahringer · Glückstadt, DE

Key dates

Filing date	Mar 24, 2006
Grant date	Aug 28, 2007
Priority date	—
Expiry date	Mar 24, 2026

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/0206
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

New methods are used for detecting arcs in a plasma process that is fed by, for example, a freely oscillating AC generator with an output signal of the AC generator for supplying power. The method includes measuring or determining a reference value that is based on a time response of the output signal or of an internal signal of the AC generator relating to the output signal. The methods also include comparing the reference value with a threshold value and detecting an arc when a predetermined result of the comparison is obtained.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.