Vibration type gyrosensor device
US7263884B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 24, 2005 |
| Grant date | Sep 4, 2007 |
| Priority date | — |
| Expiry date | Oct 17, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5642
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11, and first and second detection electrodes 6b, 6c, formed on both sides of the driving electrode 6a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6a. With a width W0 of the driving electrode 6a, a width W1 of the first detection electrode 6b, a width W2 of the second detection electrode 6c and with W=W0+W1+W2, the condition of 0.5<(W0/W)<1 is to be met.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.