Patent · US Expired

Solid-state image sensor including a microlens

US7265402B2 · kind B2 · utility

27Cited by
5References
19Claims
0Family size

Assignee

Inventor

Key dates

Filing dateNov 5, 2002
Grant dateSep 4, 2007
Priority date
Expiry dateAug 18, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10F77/50
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A solid-state image sensor has a chip-size package, which can be easily fabricated. The element-formation regions are formed in the semiconductor substrate (21) of the light-receiving element layer (20) corresponding to the pixel regions. The semiconductor light-receiving elements (PD) are formed in the respective element-formation regions and covered with the light-transmissive insulator films (25a), (25b) and (26). The light-introducing layer (40), which includes the light-introducing cavity (42) and the quartz cap (51) for closing the cavity, is formed on the film (26). The microlenses (43) are incorporated into the cavity (42). The electric output signals of the semiconductor light-receiving elements (PD) are taken out to the bottom of the substrate (21) by way of the buried interconnections of the substrate (21) and then, derived to the outside of the image sensor by way of the output layer (10) or the interposer (10A).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.