Fourier Transform spectrometer apparatus using multi-element MEMS
US7265830B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 25, 2005 |
| Grant date | Sep 4, 2007 |
| Priority date | — |
| Expiry date | Apr 21, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/021
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Fourier Transform (FT) spectrometer apparatus uses multi-element MEMS (Micro-Electro-Mechanical-Systems) or D-MEMS (Diffractive Micro-Electro-Mechanical-Systems) devices. A polychromatic light source is first diffracted or refracted by a dispersive component such as a grating or prism. The dispersed beam is intersected by a multi-element MEMS apparatus. The MEMS apparatus encodes each spectral component thereof with different time varying modulation through corresponding MEMS element. The light radiation is then spectrally recombined as a single beam. The beam is further split into to a reference beam and a probe beam. The probe light is directed to a sample and then the transmitted or reflected light is collected. Both the reference beam and probe beam are detected by a photo-detector. The detected time varying signal is analyzed by Fourier transformation to resolve the spectral components of the sample under measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.