Patent · US Expired

Flange assembly of an optical system

US7265919B2 · kind B2 · utility

0Cited by

10References

39Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Johannes Rau · Gerstetten, DE
Martin Mahlmann · Heidenheim, DE

Key dates

Filing date	Nov 10, 2004
Grant date	Sep 4, 2007
Priority date	—
Expiry date	Dec 10, 2024

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70891
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A flange assembly of an optical system has a first flange, a compensation element and a second flange. The flanges and the compensation element are substantially axially symmetric both flanges (2, 2′) being suitable for being connected to other components of the optical system in a non-destructive, non-positive axially separable fashion. The two flanges consist of different materials with different coefficients of linear thermal expansion. The compensation element is radially soft, but connects the two flanges rigidly in their relative spatial position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.