Motion control stages and methods of making the same
US7266272B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 21, 2005 |
| Grant date | Sep 4, 2007 |
| Priority date | — |
| Expiry date | Mar 25, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/003
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A motion control stage assembly includes a payload assembly and a base assembly joined together with connecting elements. The connecting elements provide degenerate support between the base and the payload such that a desired trajectory of the payload with respect to the base is relatively unconstrained. The connecting element assemblies are substantially planar, and each includes a first connecting element with a first intermediate point, a second connecting element with a second intermediate point, and a secondary connecting element that joins the first and second connecting elements at the first and second intermediate points. The first and the second connecting elements may be formed integrally with each other, of materials including a semiconductor material, a resilient metal or a plastic, and by processes including micromachining, wire-electrical-discharge machining, or injection molding.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.