Sensor for helium or hydrogen
US7266991B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 25, 2001 |
| Grant date | Sep 11, 2007 |
| Priority date | — |
| Expiry date | Apr 14, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/64
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a sensor (1) for helium or hydrogen with a vacuum-tight housing (2), wherein a gas consuming cold cathode array (3, 4) is arranged, in addition to a selectively active passage (9) for the gas to be detected. According to the invention, in order to improve the properties of said sensor, the housing (2) is made of glass, components of the gas passage (9) include a membrane (18) made of a silicon material having the desired selective qualities, in addition to a silicon plate (19) which supports the membrane (18) and is provided with a plurality of openings (21) and a heating element (24). The housing (2) and the selectively active gas passage (9) are joined together without polymer and elastomer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.