Inertial micromechanical tuning-fork gyrometer
US7267004B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 7, 2004 |
| Grant date | Sep 11, 2007 |
| Priority date | — |
| Expiry date | Oct 7, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5769
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a micromachined gyrometer having a planar moving structure anchored on a fixed substrate by anchoring feet, the fixed substrate being mounted on a support substrate via fasteners, the moving structure comprising at least two moving assemblies that are symmetrical with respect to an axis of symmetry A1; the anchoring feet are located outside this axis A1. The fixed substrate has etched features for the purpose of partly isolating at least one region from the rest of the fixed substrate, this region having a portion of the fixed substrate that includes at least one anchoring foot, and the fixed substrate is mounted on the support substrate via fasteners applied outside the region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.