Method for removing titanium dioxide deposits from a reactor
US7267842B2 · kind B2 · utility
2Cited by
13References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2004 |
| Grant date | Sep 11, 2007 |
| Priority date | — |
| Expiry date | Jul 27, 2025 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4405
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process for the selective removal of a TiO2-containing substance from an article for cleaning applications is disclosed herein. In one embodiment, there is provided a process for removing a TiO2-containing substance from an article comprising: providing the article having the TiO2-containing substance deposited thereupon; reacting the substance with a reactive gas comprising at least one selected from a fluorine-containing cleaning agent, a chlorine-containing cleaning agent and mixtures thereof to form a volatile product; and removing the volatile product from the article to thereby remove the substance from the article.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.