Mask, mask chip, manufacturing method of mask, manufacturing method of mask chip, and electronic device
US7268406B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 21, 2006 |
| Grant date | Sep 11, 2007 |
| Priority date | — |
| Expiry date | Jun 21, 2026 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/042
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mask in which a plurality of mask chips are connected to one another via a supporting member, includes: a plurality of first opening sections that are provided in the plurality of mask chips and that correspond to a pattern to be formed; a cutout section provided at at least one of side faces opposing to each other of the mask chips adjacent to each other; a gap section provided at a connected section connecting the mask chips adjacent to each other, the gap section being composed of the cutout section and including a second opening section corresponding to a pattern to be formed; and a block section that is provided at at least one of the mask chips adjacent to each other and that covers the gap section other than the second opening section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.