Patent · US Expired

Apparatus and method for inspecting a semiconductor component

US7268867B2 · kind B2 · utility

5Cited by

13References

18Claims

0Family size

Assignee

Vistec Semiconductor Systems GmbH · DE

Inventors

Wolfgang Vollrath · Burbach, DE
Thomas Krieg · Erbach, DE

Key dates

Filing date	Mar 10, 2005
Grant date	Sep 11, 2007
Priority date	—
Expiry date	Oct 15, 2025

Classification

Technology area (CPC G)Physics
CPC primaryG01N21/9501
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Examination devices and methods operating with incident light have hitherto been used for the examination of wafers. To allow these devices also to be used with the transmitted-light method, it is proposed to configure the substrate holder (16) so that an illumination device (38, 40, 42) is integrated into the substrate holder (16) in such a way that transmitted-light illumination of the wafer (18) is possible.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.