Overlapping common-path interferometers for two-sided measurement
US7268887B2 · kind B2 · utility
7Cited by
6References
33Claims
0Family size
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Key dates
| Filing date | Dec 23, 2004 |
| Grant date | Sep 11, 2007 |
| Priority date | — |
| Expiry date | Jul 4, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/45
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Two common-path interferometers share a measuring cavity for measuring opposite sides of opaque test parts. Interference patterns are formed between one side of the test parts and the reference surface of a first of the two interferometers, between the other side of the test parts and the reference surface of a second of the two interferometers, and between the first and second reference surfaces. The latter measurement between the reference surfaces of the two interferometers enables the measurements of the opposite sides of the test parts to be related to each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.