Phase-resolved measurement for frequency-shifting interferometry
US7268889B2 · kind B2 · utility
6Cited by
13References
42Claims
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Key dates
| Filing date | Sep 22, 2004 |
| Grant date | Sep 11, 2007 |
| Priority date | — |
| Expiry date | Nov 16, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/60
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A frequency-shifting interferometer gathers intensity data from a set of interference patterns produced at different measuring beam frequencies. A periodic function is matched to the intensity data gathered from the set of interference patterns over a corresponding range of measuring beam frequencies. Localized correlations involving phase offsets between the interfering portions of the measuring beam are used to inform a determination of a rate of phase change with measuring beam frequency corresponding to the optical path length difference between the interfering beam portions.
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