Optical waveguide device, manufacturing method for optical waveguide device and intermediate of optical waveguide device
US7269309B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 17, 2005 |
| Grant date | Sep 11, 2007 |
| Priority date | — |
| Expiry date | Jun 23, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/423
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The spacers 3 and 4 and the recess is formed on the supporting substrate 2 to support the upper cladding layer 7. The intermediate surface 22 and 23 lower than the top surface of the spacers 3 and 4 and higher than the inner bottom surface of the recess is formed on the supporting substrate 2. Each of the height between the top surface of the spacers 3 and 4 and the intermediate surfaces 22 and 23, and the height between the intermediate surfaces 22 and 23 and the inner bottom surface of the recess of the second substrate 2 becomes thin compared with the total thickness of the lower cladding layer. Thus, when the resin for the lower cladding layer 9 is cured to shrinkage, the inner stress in the resin is dispersed and the occurrence of the wrinkle 12 and the void decreases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.