Humidity sensor element, device and method for manufacturing thereof
US7270002B2 · kind B2 · utility
8Cited by
2References
6Claims
0Family size
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Key dates
| Filing date | Jun 3, 2004 |
| Grant date | Sep 18, 2007 |
| Priority date | — |
| Expiry date | Sep 21, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A humidity sensor element, a humidity sensor device and a method for manufacturing thereof are provided. The humidity sensor element includes a substrate having a nanocomposite film as sensing material, wherein said nanocomposite film consists of carbon nanotube/perfluorinated polymer with acid functional groups in weight ratio of 0.01-20; and at least a pair of electrodes, which contact with the sensing material at one or both side(s). The nanocomposite film increases the sensitivity of humidity sensor element such that even an infinitesimal amount of moisture can be detected with minimum detection limit of 15.76 ppmv.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.