Process for the observation of at least one sample region with a light raster microscope with light distribution in the form of a point

US7271382B2 · kind B2 · utility

Assignee

• Carl Zeiss Jena GmbH · DE

Inventors

• Ralf Engelmann · Jena, DE
• Joerg-Michael Funk · Arth, CH
• Joerg Steinert · Jena, DE
• Bernhard Zimmermann · Großenhain, DE
• Stefan Wilhelm · Unterhaching, DE
• Joerg Engel · Triebes, DE
• Ulrich Meisel · Jena, DE

Key dates

• Filing date: Oct 19, 2004
• Grant date: Sep 18, 2007
• Expiry date: Oct 19, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/248
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Process for the observation of at least one sample region with a light raster microscope by a relative movement between the illumination light and sample via first scanning means along at least one scanning axis essentially perpendicular to the illumination axis wherein the illumination light illuminates the sample in parallel at several points or regions and several points or regions are detected simultaneously wherein at an angle to the plane of the relative movement, preferably perpendicular thereto, second scanning means are moved and an image acquisition takes place by the movement of the first and second scanning means being coupled and a three-dimensional sampling movement being done by the illumination of the sample wherein the second scanning means are coupled to the movement of the first scanning means in such a manner that straight and/or curved lines and/or plane and/or curved surfaces are scanned which are extended along at least one scanning direction of the first scanning means as well as along the scanning direction of the second scanning means.