Patent · US Expired

Method for increasing the spectral and spatial resolution of detectors

US7271897B2 · kind B2 · utility

3Cited by

6References

5Claims

0Family size

Assignee

Carl Zeiss Jena GmbH · DE

Inventors

Ralf Wolleschensky · Jena, DE
Gunter Moehler · Jena, DE
Volker Gerstner · Jena, DE

Key dates

Filing date	Jul 15, 2005
Grant date	Sep 18, 2007
Priority date	—
Expiry date	Jul 15, 2025

Classification

Technology area (CPC G)Physics
CPC primaryG02B21/16
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method of optical detection of characteristic quantities of an illuminated specimen comprising detecting a signal that is backscattered, reflected and/or fluoresced and/or transmitted from the specimen by a spatially resolving detector wherein radiation coming from the specimen is imaged on the detector, shifting the position of the radiation which is measured in a spatially resolved manner relative to the detector and determining intermediate values by an algorithm from the signals measured in different shifts for purposes of increasing the spatial resolution of the detector. An arrangement for performing the method is also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.