System and method for process-flexible MEMS design and simulation
US7272801B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2004 |
| Grant date | Sep 18, 2007 |
| Priority date | — |
| Expiry date | May 5, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F2115/04
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A system-level design and simulation environment utilizing a process specification tool that is programmatically integrated with the system level design and simulation environment thereby enabling the process-flexible design and simulation of Micro Electro-Mechanical Systems (MEMS) devices and other micro-fabricated devices is disclosed. The process specification tool is a software tool for specifying the details of the fabrication process and enables the separation of the process data from the system-level design and simulation environment. The process specification tool retrieves the process data, which may include both the process specification and material properties data. The separation of this process data from the system-level design and simulation environment allows the system-level model to have process-related parameters whose specification is not fixed, but rather is tied by reference to the process data. The tying of components to the process data allows the system-level environment to extract multiple process parameters for each component model instead of requiring duplicate entry of these parameters in each component model, a time-consuming and error prone process. Mo…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.