Method for forming a planar mirror using a sacrificial oxide
US7273693B2 · kind B2 · utility
11Cited by
0References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 30, 2004 |
| Grant date | Sep 25, 2007 |
| Priority date | — |
| Expiry date | Jul 2, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro electromechanical system (MEMS) mirror, comprising a displaceable hinged member, a mirror plate, and a plurality of mirror support elements. The mirror plate has a planar mirror face affixed thereto. The plurality of mirror support elements extend between the displaceable hinged member and the mirror plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.