Systems and methods for nanowire growth and harvesting
US7273732B2 · kind B2 · utility
13Cited by
54References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 21, 2006 |
| Grant date | Sep 25, 2007 |
| Priority date | — |
| Expiry date | Jul 21, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/891
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrifical growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.