Capacitive discharge plasma ion source

US7274015B2 · kind B2 · utility

Assignee

• Sionex Corporation · US

Inventors

• Raanan Miller · Cambridge, US
• Erkinjon G. Nazarov · Lexington, US
• Evgeny Krylov · Franklin, US
• Gary A. Eiceman · Las Cruces, US
• Lawrence A. Kaufman · Boston, US

Key dates

• Filing date: Aug 7, 2002
• Grant date: Sep 25, 2007
• Expiry date: Jun 3, 2024

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05H1/466
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In a system for chemical analysis, an RF-driven plasma ionization device including a pair of spaced-apart and plasma-isolated electrodes, the electrodes are connected to a power source wherein the electrodes act as plates of a capacitor of a resonant circuit, the gas electrically discharges and creates a plasma of both positive and negative ions, and the voltage is applied as a continuous alternating waveform or as a series of pulses, such as a packet waveform.