Piezoelectric/electrostrictive structure and method for manufacturing the same
US7274134B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 26, 2005 |
| Grant date | Sep 25, 2007 |
| Priority date | — |
| Expiry date | Sep 28, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/883
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric/electrostrictive structure is provided, including a plurality of stacked sheet-shaped piezoelectric/electrostrictive bodies and at least one sheet of a thin film. The interfaces between the piezoelectric/electrostrictive bodies are exposed at side faces of the piezoelectric/electrostrictive structure, the side faces have notches, and the thin film is placed on the notched portions of side faces. A method for manufacturing the piezoelectric/electrostrictive structure includes the steps of stacking a plurality of ceramic green sheets made of a piezoelectric/electrostrictive material, firing the stacked ceramic green sheets to prepare fired piezoelectric/electrostrictive bodies and forming at least one sheet of a thin film on side faces of the fired piezoelectric/electrostrictive bodies by a chemical vapor deposition process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.